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Electronics & Semiconductors
Wafer Chuck
Wafer Chuck

Problem:
A leading manufacturer of semiconductor wafers found that the vacuum wafer chuck, made from an aluminum alloy, was experiencing wear and corrosion from chemical attack from silicon wafer processing.  The equipment had been hard coat anodized, but the coating was not tough enough.

Solution:
After examination, Magnaplate coated the equipment in Magnaplate HCR, which was developed to provide corrosion and abrasion resistance to aluminum parts.  The Magnaplate HCR coating imparted optimal hardness and provided abrasion and corrosion protection to solve the problem.

Magnaplate HCR is a superior alternative to hard anodizing with nickel acetate, or sealed anodizing.